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Our standard glovebox system enables loading and coating of moisture and oxygen sensitive substrates under the inert environment of a glovebox.
The UNIVEX G systems have a front sliding door for connection to the glovebox. This sliding door allows the operator an easy access to the process chamber via the glovebox. In case direct access is required, the UNIVEX G have a second door at the rear.
Common applications
- Contact metallization (evaporation of gold, silver, chromium, nickel, titanium, etc.)
- Biosensors / medical devices
- Organic electronics: OLED, organic photovoltaics
- Quantum dots / display
- E-beam and organics evaporators for inorganic-organic perovskite formation
Direct and easy access to process equipment via front side sliding door
Convenient service access via back side hinged door
Integration of any process components
UNIVEX G 450
Owing to its chamber dimensions, the UNIVEX G 450 is suited for all coating tasks requiring much space. Substrates, respectively substrate holders up to an overall diameter of over 400 mm can be processed. With a height of 650 mm, the vacuum chamber is also suited for lift-off applications.