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UNIVEX C - CLUSTER
Our UNIVEX clusters are equipped according to customer requirements and incorporate separate processing, load lock and transfer chambers. Generally, each vacuum chamber will have its own high vacuum system. The load lock chamber is in the simplest case loaded manually with individual substrates. In addition, magazine processing of several substrates per batch is possible.
For transporting the substrates between the individual vacuum chambers, commonly motor driven robot arms or linear transfer drive units are used. The UNIVEX control software is customised according to the specific application requirements, and will generally allow fully automatic running of the process including recipe processing.