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UNIVEX 900
The UNIVEX 900 is the most sophisticated solution for medium to large substrate sizes, respectively for higher substrate throughputs. Substrates / substrate holders up to an overall diameter of 800 mm can be coated. The system controller allows you to run manual, semi-automatic and fully automated coating processes.
Common applications
- Optical coatings
- Opto-electronic devices
- Resistive RAM
- High-temperature superconductors
Typical configurations
- Substrate heaters and/or coolers
- Multi-pocket e-beam with ion-sources for substrate pre-clean and ion-assisted deposition
- Palette, domed or planetary substrate configurations for single or multiple samples
- Multiple-sputter guns in confocal or face-to-face configuration