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High vacuum pumps with high gas-throughput and pumping speed
Leybold DIJ series of oil diffusion pumps are high vacuum pumps (<10-2 mbar) featuring an advanced design with innovative heater system, special body construction, and a five-stage nozzle system for faster pump down of the process chamber, reduced energy consumption and a lower carbon footprint.
The DIJ series provide an improved gas throughput and stable high vacuum pressure in the range of < 10-2 mbar. The pumping speed ranges from 3,000 l/s to 33,000 l/s in an operating range of < 5 x 10-1 to 10-7 mbar.
The DIJ features an advanced new heating concept, a powerful five-stage nozzle system, variable flange connections, a multitude of electrical connection options including the Energy Efficiency Controller (EEC), fully equipped with fore-line baffles and cold cap baffles. The DIJ five-stage system design provides excellent performance. Four diffusion pump stages for the high pumping speed and one ejector stage for high gas throughput at pressures of <10-2 mbar and a high fore-vacuum stability. The variants with EEC offer added energy efficiency resulting in further energy savings and a lower carbon footprint.
Leybold DIJ oil diffusion pumps require little maintenance - no wear caused by revolving parts - easy to operate. The DIJ series is impressive with its innovative and highly energy-efficient construction.