Vacuum gauge calibration systems

Process reliability requires checks, adjustments and recalibration of vacuum gauges and sensors at regular intervals.

Setting devices to an initial value is an important component of quality assurance. Calibrated gauges are particularly used where high requirements are made on reproducibility and compatibility as well as on the quality of testing processes. Also, if a clear reference is required for lots of existing pressure measurement devices, calibration is a must.

The CS calibration systems enable you to check and calibrate your vacuum gauges to the defined and required measurement accuracy. This can follow the standards of the German Accreditation Body (DAkkS) or any international standard, whereas the required measurement accuracy must be defined by the users.

In this context the term “Calibration” signifies the comparison of measured values taken from the gauge to be calibrated and a so-called “reference gauge or transfer standard”. As a condition, both gauges must be connected to the same vacuum chamber that is designed in line with ISO 3567 regulations. The reference gauge itself (along with the pressure display and connecting cable) must be calibrated against a traceable transfer standard, at least once a year.

Our reference gauges will be certified by comparing against a PTB¹⁾ transfer standard by the DAkkS²⁾ calibration service of the Leybold GmbH.

1) PTB - Physikalisch-Technische Bundesanstalt, Berlin (Federal Institute for physics and technology)

2) DAkkS - Deutsche Akkreditierungsstelle (German calibration service)

We have been calibrating all makes of gauges and sensors independently for customers since 1981.

A DAkkS or factory calibration certificate is issued for the calibration process. Devices with inadequate long-term stability or for measurement principles which are unsuitable for calibration cannot be calibrated.

Calibration can be conducted in static or dynamic mode.

• Static means the calibration chamber is isolated from the pump system and gas is admitted until the desired pressure value is reached. This method requires a low outgassing rate, which is achieved by a clean calibration chamber and an extensive pumping time.
• Using dynamic calibration, the chamber pressure is adjusted by means of a gas dosing valve and a throttling valve on the turbo-molecular pump intake. The inlet gas quantity is manually balanced with the pumped gas flow to set a stable pressure.

CS 7

• Customized product for serving calibration ranges from 1000 mbar (Torr) down to 1 x 10^-7 mbar (Torr).
• Usually used at research institutes or calibration labs.

• Checking the characteristics of vacuum gauges
• Precise calibration of vacuum gauges in accordance with DAkkS (national accreditation body for the Federal Republic of Germany) or other international standards
• Ensure reproducible parameters
• Simple to operate calibration systems
• Chamber, turbomolecular pump system, vacuum gauges and additional components depending on the calibration pressure