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Performance, Reliability, and Versatility
INFICON Transpector CPM has been the market-leading Residual Gas Analyzer (RGA) process monitoring system in the semiconductor industry for over a decade. Now Transpector CPM 3 provides industry leading measurement speed and sensitivity through a field proven pumping and inlet system integrated with a new sensor and electronics. Transpector CPM 3 is the ideal RGA process monitor for new and established semiconductor processes such as ALD, CVD, PVD, and Etch.
Transpector CPM 3 provides proven return on investment to our partners through:
Industry Leading Measurement Technology
Robust and Adaptive Architecture
Ease of Maintenance
Superior Product Support
Features
Residual Gas Analyzer for ALD, Etch, CVD and 300 mm Degas—enables real-time process monitoring and analysis
ALD-Ready with 1.8 ms per point (555 points per second) measurement speed
Field-proven durability and reliability in the most demanding CVD and Etch applications
Application Integration—Transpector CPM becomes a powerful process monitoring and diagnostics tool when integrated with FabGuard software and supported by INFICON world-class applications experts
Compact size—allows for easy integration into production semiconductor equipment
Hexblock™ with up to three pressure inlets and reduced surface area to minimize surface reactions and response times
Capacitance Diaphragm Gauge (CDG)—CDG allows user to monitor the process pressure and automatically protect the system from pressure excursions
Automated calibration—ensures long-term data stability and accuracy for sensor to sensor and tool to tool chamber matching