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INFICON Stripe high-speed Capacitance Diaphragm Gauges are the fastest, highly accurate vacuum measurement instruments available. With a less than 2 ms response time combined with the EtherCAT fieldbus interface it opens up a total new field of applications.
The proven temperature controlled, corrosion resistant, ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability. Stripe comes with the INFICON patented unique sensor shield which protects the gauge from undesired process by-products.
INFICON Stripe using an innovative heating concept, which provides a cool to the touch surface, and its unique speed capabilities,enabling an unprecedented productivity increase, making it the most advanced vacuum instrument of its kind.
Stripe CDG045Dhs is a proud winner of the prestigious 2014 R&D 100 Award!
Advantages
High productivity – Faster than 2 ms response time (FS > 50 mTorr)
Flexible integration – EtherCAT fieldbus
Long lifetime – Proven ceramic sensor
Forget recalibration – 90 ppm/year full scale stability
Typical applications
Atomic layer deposition
High speed process control
PVD, CVD, Etch
General high temperature vacuum applications