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The INFICON Bayard-Alpert Pirani Capacitance Diaphragm Gauge (Triple-Gauge™), BCG450, combines the advantages of three different technologies in a single, compact, economical package to measure process and base pressure from 5×10-10 to 1500 mbar (3.75×10-10 to 1125 Torr).
The BCG450 is designed to take the place of three sensors (hot ion, convection enhanced Pirani and vacuum switch), thus reducing cost and valuable tool space.
Also available wth Profinet digital interface.
Advantages
BCG450 saves cost and tool space and reduces the complexity of vacuum measurement installation and setup
Gas-type-independent pressure measurement above 10 Torr provides more reliable loadlock control for any gas mixture
Pirani interlock protects the hot filament from premature burnout
Automatic high vacuum Pirani adjustment reduces operator interventions
Differential pressure measurement at atmosphere eliminates uncertainty related to atmospheric pressure changes
Easy-to-exchange sensing element with on-board calibration data guarantees reproducibility
Optional graphic display and Fieldbus interfaces available
RoHS compliance
Typical applications
Pressure measurement in Semiconductor process, transfer and loadlock chambers
Industrial coating
General vacuum measurement and control on systems in the low to ultra high vacuum range